E19400 - SEMI E194 - Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons StdTpc-Equipment Communications and AI together

and AI together

org in June 2013

7 mm (1/2 in

本書は，ポリマーペレットの表面積を測定するための試験方法を規定する。

The specification recognizes only two discrete material forms monocrystalline and multicrystalline

E19400 - SEMI E194 - Guide to Using a Liquid Particle Counter to Assess Particulate Surface Contamination on Critical Chamber Components and Coupons StdTpc-Equipment Communications and AI together1 Purpose 1. 1 This Guide describes analytical methods for determining the extractable surface particles from a critical chamber component (CCC) or a coupon by using ultrasonic aided, deionized water (DIW) extraction followed by using a liquid particle counter (LPC). 1. 2 This Guide is intended to promote communication among the relevant parties (e. g., processing equipment users, processing equipment manufacturers, CCC manufacturers, cleaning service